WaferMark® SigmaDSC™
- 100-300mm Hard Mark Wafer Marking System



Ultra-stable patented diode-pumped laser
Unsurpassed production marking flexibility
Handles wafers from 100mm through 200mm diameter
Available 300mm kit handles 300, 200, and 150mm wafers
Marks SEMI OCR, BC412, 2D Matrix and other font formats
Custom mark verification and reader options available
Optional SECS II/GEM interface for factory communication/networking
No external cooling required